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At the SPIE Photomask Technology Conference in October, Aki Fujimura, CEO of D2S, Inc., moderated a panel discussion of the factors driving 193i lithography down to smaller nodes. He was joined by Chris Progler, CTO of Photronics; Glen Scheid, Operations Manager at the Micron Mask Technology Center; and Harry Levinson, Principal Lithographer at HJL Lithography.
Using digital twins to bridge the data gap that keeps deep learning prototypes from moving to production.
The expert panel at DAC 2023 tell us what they think is needed to make curvy design a reality. Automatic curvy routing and parasitic extraction will be essential, while DRC may become easier.
Curvilinear technology could boost yield and improve scalability, but it requires full industry support and a lot of work. Article includes comments from D2S CEO Aki Fujimura.

D2S CEO Aki Fujimura Named a SPIE Fellow

Press Release • September 26, 2023

Aki Fujimura recognized by SPIE for his technical leadership in applying GPU acceleration to semiconductor manufacturing software, significant service to SPIE, and industry collaboration through the eBeam Initiative
Smarter tools can improve process control, identify the causes of excursions, and accelerate recipe development.