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Experts at the Table: Deep learning is a hot topic, but can the industry use it for mask making? (Part 3)
TrueMask® DLK includes rigorous eBeam mask and ArF/EUV lithography simulators from OEM partners for deep learning training
Harold Zable, Chief Technical Wizard at D2S, presented results at the GPU-Technology Conference 2019, in San Jose
Leo Pang explains why GPU-accelerated simulation is so important to deep learning
Ryan Pearman presents a Monte-Carlo approach to curvilinear mask features

Variation Issues Grow Wider And Deeper

Publication • January 24, 2019

New sources, safety-critical applications and tighter tolerances raise new questions both inside and outside the fab.