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Page 23
Semiconductor Engineering: What Machine Learning Can Do In Fabs
News • March 25, 2020
Experts at the Table: It’s not as accurate as simulation, but it’s a lot faster.
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TrueMask
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ILT MWCO: Full-Chip Curvilinear ILT in a Day & Full Mask Multi-Beam and VSB Writing in 12 hours for 193i
Publication • March 4, 2020
Presented at SPIE Advanced Lithography Conference by Leo Pang of D
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D
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Press Release • February 25, 2020
D
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®
WPA enables fast and accurate simulation of complex and curvilinear mask shapes for cost-effective CD metrology
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EE Journal: Full-Chip ILT in a Day
News • December 3, 2019
D
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Semiconductor Engineering: Making And Protecting Advanced Masks
News • November 28, 2019
Experts at the Table: AI, EUV pellicles and inverse lithography are hot topics in mask making today
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Semiconductor Engineering: Using Digital Twins And DL In Lithography
News • November 22, 2019
How to speed up manufacturing with inverse lithography technology with complex curvilinear data, with Leo Pang of D
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