Glen Scheid of Micron, Harry Levinson of HJL Lithography, and Naoya Hayashi of DNP (pictured left to right) debate the results of this year’s Luminaries Survey during SPIE PUV with Aki Fujimura as moderator. Part 2 covers mask writer costs, EUV pellicles, curvilinear ILT and the extendibility of 193i.